A Longitudinal-Bending Hybrid Linear Ultrasonic Motor and Its Driving Characteristic

As a new type of driver, linear ultrasonic motor (LUSM) is widely used in the high-tech field because its low speed, high thrust, noise, and no electromagnetic interference. However, as an actuator microdevices, most existing LUSMs are large size not compact structure. In order to overcome these limitations, structure motor’s stator developed this paper. The similar tuning fork structure, which divided into three parts: two driving feet, legs, body. By using first-order longitudinal vibration mode whole unique partial second-order bending legs achieve degeneracy, hybrid that easy miniaturize proposed. Its working principle analyzed. dynamic analysis carried out by finite element software. dimension frequency under determined. At same time, feasibility feet synthesizing elliptical motion verified theoretically experimentally. addition, LUSM test setup built. effects Vpp on stall force average velocity studied. results show maximum can reach 99 mN, 88.67 mm/s with = 320 V 80.2 kHz. proposed appropriate for use occasions quick return characteristics, like controlling valve or nozzle printer. research provide guidance design motor.